1. Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses
پدیدآورنده : / by Christopher L. Borst, William N. Gill, Ronald J. Gutmann
کتابخانه: مكتبة حرم كيش الدولي بجامعة طهران (هرمزکان)
موضوع : Interconnects (Integrated circuit technology),Semiconductors -- Polishing,Grinding and polishing,Chemical mechanical planarization
رده :
TK
7874
.
53
.
B67
2002
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